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  • Experimentally validated finite element model for mechanical and fracture characteristics of SiCN thin films under different loads

    Experimentally validated finite element model for mechanical and fracture characteristics of SiCN thin films under different loads

    In this section, we begin by discussing the experimental findings regarding the influence of the maximum applied load on the mechanical properties of the SiCN thin film ( Section 4.1). Subsequently, we proceed to validate the Finite Element (FE)…

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