Design, fabrication, and mechanical response
Figure 1a illustrates the fabrication process of the proposed 3D capacitive pressure sensor. As shown in the inset at the upper left of Fig. 1a, the capacitor consists of an upper cage-like structure…
Figure 1a illustrates the fabrication process of the proposed 3D capacitive pressure sensor. As shown in the inset at the upper left of Fig. 1a, the capacitor consists of an upper cage-like structure…
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