Ferroelectric ScAlN/GaN heterostructure
As illustrated in Fig. 1a, a 70-nm-thick Sc0.18Al0.82N film was grown on 2-inch GaN/sapphire templates by MBE. The ScAlN film exhibited an atomically smooth surface and a single crystalline c-axis texture,…
As illustrated in Fig. 1a, a 70-nm-thick Sc0.18Al0.82N film was grown on 2-inch GaN/sapphire templates by MBE. The ScAlN film exhibited an atomically smooth surface and a single crystalline c-axis texture,…