Equivalent electrical single metal line model for Cu–Carbon hybrid interconnect structure.
Figure 12 describes the electrical circuit model of a single-line Cu–Carbon hybrid interconnect structure. Here, \(R_{icon}\) denotes the…
Equivalent electrical single metal line model for Cu–Carbon hybrid interconnect structure.
Figure 12 describes the electrical circuit model of a single-line Cu–Carbon hybrid interconnect structure. Here, \(R_{icon}\) denotes the…