Preparation of flexible parylene substrate
A silicon wafer was adopted as the supporting plate for the flexible substrate during the fabrication. A 2-μm-thick parylene-C film was deposited on the silicon wafer by chemical vapor deposition (SCS…
A silicon wafer was adopted as the supporting plate for the flexible substrate during the fabrication. A 2-μm-thick parylene-C film was deposited on the silicon wafer by chemical vapor deposition (SCS…