Free-standing growth of MoO3 dielectrics
The physical vapor deposition (PVD) technique was employed to grow layered MoO3 on SiO2/Si substrates (see Methods for details). From the scanning electron microscopy (SEM) images as shown in Fig. 1a, b,…
Controllable growth of MoO3 dielectrics with sub-1 nm equivalent oxide thickness for 2D electronics
