Sensing mechanism
A single BAW resonator system can be modeled as a mass-spring-damper system and a representation that also extends to 2 and 3-degree-of-freedom (DoF) resonating devices30, as illustrated in Fig. 1. Figure 1a shows the proof mass…
Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application
