Device fabrication and parameters
DKS devices are fabricated on a commercial Z-cut thin-film lithium niobate (Z-TFLN) on-insulator wafer (NANOLN). The initial film thickness is 600 nm of Z-TFLN on top of 2 μm thermal oxide and 0.525 mm…
DKS devices are fabricated on a commercial Z-cut thin-film lithium niobate (Z-TFLN) on-insulator wafer (NANOLN). The initial film thickness is 600 nm of Z-TFLN on top of 2 μm thermal oxide and 0.525 mm…