Materials
Boron-doped Si wafers, <100> face orientation with 0.8–1.0 mΩ cm resistivity, were purchased from Siltronix (France). Methanol (MeOH), hydrofluoric acid (48%), absolute ethanol, AgNO3 (≥99%), DTNB ( ≥ 98%), hydrogen peroxide…
Boron-doped Si wafers, <100> face orientation with 0.8–1.0 mΩ cm resistivity, were purchased from Siltronix (France). Methanol (MeOH), hydrofluoric acid (48%), absolute ethanol, AgNO3 (≥99%), DTNB ( ≥ 98%), hydrogen peroxide…